In this study, (AlCrTaTiZr)N x multi-component coatings with quinary metallic elements were developed as protective hard coatings for tribological application. The mechanical properties, creep behaviors, deformation mechanisms and interface adhesion of the (AlCrTaTiZr)N x coatings with different N contents were characterized. With increasing the N 2 -to-total (N 2 +Ar) flow ratio, R N , during sputtering deposition, the (AlCrTaTiZr)N x coatings transformed from an amorphous metallic phase to a nanocomposite and finally a crystalline nitride structure. The hardness of the coatings accordingly increased from 13GPa to a high value of about 30GPa, but the creep strain rate also increased from 1.3×10 −4 to 7.3×10 −4 1/s. The plastic deformation of the amorphous metallic coating deposited with R N =0% proceeded through the formation and extension of shear bands, whereas dislocation activities dominated the deformation behavior of the crystalline nitride coatings deposited with R N =10% and 30%. With increasing R N , the interface adhesion energy between the coatings and the substrates was also enhanced from 6.1 to 22.9J/m 2 .