The deposition rates of plasma-polymerized (pp-)films of 12 acrylate derivatives (CH 2 CHCOOR: substitution R is H, CH 3 , CH CH 2 , CH 2 CH 3 , CH 2 CH 2 CH 3 , (CH 2 ) 3 CH 3 , C(CH 3 ) 3 , CH 2 CH(CH 3 ) 2 , CH 2 (CH 2 ) 4 CH 3 , CH 2 CF 3 , CH 2 CF 2 CF 3 , CH 2 (CF 2 ) 2 CF 3 ), and 12 methacrylate derivatives (CH 2 CCH 3 COOR': substitution R' is H, CH 3 , CH CH 2 , CH 2 CH 3 , CH 2 CH 2 CH 3 , (CH 2 ) 3 CH 3 , C(CH 3 ) 3 , CH 2 CH(CH 3 ) 2 , CH 2 (CH 2 ) 4 CH 3 , CH 2 CF 3 , CH 2 CF 2 CF 3 , CH 2 (CF 2 ) 2 CF 3 ) are determined by the quartz crystal microbalance technique. Using the same polymerization conditions (100 W RF and 100 Pa vapor pressure) for the various monomers, it is found that the deposition rates were proportional to the polymerization time. The average deposition rate of pp-acrylate derivatives is larger than that of pp-methacrylate derivatives without pp-hexylacrylate. The average deposition rate of pp-fluoroalkylacrylates was higher than 7-25 times that of pp-alkylacrylate, and the average deposition rate of pp-fluoroalkylmethacrylates was higher than 10-31 times that of pp-alkylmethacrylates, respectively. The average deposition rate of pp-film depends on the chemical structure of the monomer suggesting different mechanisms under plasma-polymerization.