Comparative studies on the properties of Cu 2 ZnSnS 4 (CZTS) thin films and performance of CZTS thin film solar cells (TFSCs) prepared by different sulfurization types such as commerical furnace (CF) and rapid thermal annealing (RTA) systems have been investigated. The CZTS thin film prepared using CF showed the dense microstructure with many voids and secondary phases, while that prepared using RTA showed the dense microstructure without void and with some secondary phases. The RTA annealed CZTS TFSC have shown better performance than that prepared using CF. The best performance of CZTS TFSC using RTA was 1.9% efficiency (V oc : 505mV,J sc : 7.5mA/cm 2 and FF: 50.2%).