SrRuO 3 thin films have been grown in situ on single crystal LaAlO 3 substrates and textured metal templates which contain an MgO layer produced by an ion-beam growth method. Deposition was made of oxygen partial pressure in a range from 50mTorr to 250mTorr with laser repetition rate of 5Hz. Substrate temperature was between 600°C and 800°C. Dependence of out-of-plane and in-plane orientation of SrRuO 3 thin films on pressure and growth temperature was investigated by X-ray diffraction. The surface morphology and grain growth behaviors of SrRuO 3 thin films were analyzed by atomic force microscopy and scanning electron microscopy. In addition, the transverse magnetoresistance value in a field of 4 and 8T was measured in temperature range of 50–200K and the ferromagnetic transition at ∼140K of SrRuO 3 films on LaAlO 3 was detected by resistivity measurement.