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A low-cost monolithic accelerometer which incorporates a surface-micromachined polysilicon sensor with bipolar/MOS interface circuitry on a single chip has been developed for a measurement range of ±5 g. The accelerometer has a noise floor of 0.6 mg (Hz) -1/2 and a shock survival rating of 1000 g. A sensitivity temperature coefficient of ±50 ppm °C -1 and an offset temperature coefficient of ±5 mg °C -1 have been achieved over the -40 to +105°C automotive temperature range. A wide bandwidth from d.c. to 4 kHz is adjustable using a single external capacitor. The accelerometer operates on a single 5 V power supply and consumes 40 mW of power. It provides an analog output of 200 mV g -1 and a digitally activated self-test output of -5g.