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Thin films of MgF 2 deposited by evaporation is a material widely used for its transparency in the far ultraviolet (FUV) down to ~115 nm. In this paper the optical properties of ion-beam sputtered (IBS) MgF 2 in the FUV are investigated and compared with MgF 2 films deposited by evaporation. A slightly higher transparency at the 121.6-nm, H Lyman α line was obtained for IBS...
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