Pb(Fe 1 / 2 Nb 1 / 2 )O 3 (PFN) films on Pt/Ti/SiO 2 /Si(100) substrates were fabricated by pulsed laser deposition (PLD), and Pt/Ti/SiO 2 /Si(100) were formed by the deposition of Pt and Ti on SiO 2 /Si(100) using ion-beam sputtering technique. PFN/Pt/Ti/SiO 2 /Si(100) multilayer structure has been studied using Auger electron spectroscopy (AES), X-ray diffraction (XRD), and field emission scanning electron microscopy (FE-SEM). The diffusion of platinum into PFN film and Ti layer has been observed. The formation of a TiO 2 phase was confirmed.