Effect of Si-doping on InGaN layers below the quantum wells (QWs), which cause different levels of charge concentration in the depletion region, have been investigated for InGaN light emitting diodes (LEDs). Four groups of InGaN LEDs with different levels of Si-doping on InGaN/GaN layers below quantum-wells have been produced for the experiment (i.e., 0.5 × 10 17 cm −3 for group A, 1 × 10 17 cm −3 for group B, 5 × 10 17 cm −3 for group C, and 1 × 10 18 cm −3 for group D.) The reverse leakage current of LED can be significantly decreased and the light output power of LED can be enhanced by lowering the background charge concentration in the depletion region of LED. Such result enables us to improve the device lifetime by inhibiting the degradation of the GaN-based LED.