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The effect of plate electrode area on the deflection of a symmetric circular bimorph piezoelectric micromachined ultrasonic transducer (pMUT) with clamped and simply supported boundary conditions was studied for the first time. Distinct plate displacement shape functions were defined for the regions underneath and outside the active electrodes. The plate shape functions were solved analytically using...
The use of micromachined thin-film ultrasonic radiators to improve the efficiency of conventional in-air acoustic transducers is investigated. We conduct a theoretical investigation of the parameters that determine the efficiency of thin-film transducers, using a lumped parameter model, and show that the efficiency can be improved by choosing a radiating plate thickness that can be realized by micromachining...
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