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The HfNbTaTiZr high entropy alloy was produced by vacuum arc melting, homogenized at 1200°C, and annealed at 600–1000°C for 1–100h. Structure and microhardness of the annealed alloy were investigated. A strong increase of microhardness after aging treatment at 600°C was found. Formation of second hcp phase particles in the bcc matrix after annealing at 600 and 800°C was also revealed. Effect of precipitation of second phase particles on microhardness was analyzed.