Low temperature co-fired ceramic (LTCC) materials based on CaF 2 –AlF 3 –SiO 2 oxyfluoride glass-ceramics were prepared. The sintering behaviors, phase transition, microstructures, and the dielectric properties of the glass-ceramics, as well as their compatibility with Ag electrode were investigated systematically. It was revealed that the oxyfluoride glass-ceramics could be sintered at 800–825°C. Moreover, as-prepared glass-ceramics exhibited low dielectric constant (5.93–4.93), low dielectric loss (<1×10 −3 ), sufficient mechanical strength (>150MPa), proper thermal expansion coefficient (8.4–6.0ppm/°C) and good sintering compatibility with silver electrode, which provided promising candidates for LTCC application.