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Selective Area Epitaxy (SAE) is the process of locally depositing a semiconductor film on a substrate which has been patterned with an inert masking material such as SiO 2 . During deposition by metalorganic chemical vapor deposition (MOCVD), the build up of precursors over the SiO 2 mask causes material to diffuse into the open areas leading to a growth rate increase. SAE is an important...
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