Crack free, dense and transparent CdTiO 3 thin films have been prepared by sol-gel technique using titanium butoxide and cadmium acetate. The formation of the CdTiO 3 phase started from 500 o C annealing temperature onwards. The complete orthorhombic structure of CdTiO 3 was formed on Silicon (100) substrate at an annealing temperature of 600 o C for 5h. As the annealing temperature increased from 600 to 700 o C, we have observed the cadmium silicate phase at the interface of Si and CdTiO 3 phase. Structural, morphological and elemental evolution of these CdTiO 3 thin films produced by sol-gel synthesis were characterised by grazing incidence X-ray diffraction (GIXRD), tapping mode atomic force microscopy (TMAFM), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) respectively.