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We have realized a flexible force sensor, composed of four redundant capacitors, the operation of which is based on the measurement of a load-induced capacitance change. We use polyimide both as flexible substrate and as elastic dielectric between two levels of finger-shaped aluminum electrodes. In particular we have developed a technology for realization of polyimide micro-features with gentle slopes...
A very cost effective maskless exposure device (MED) for the fast lithographic prototyping of various layouts is presented. The device is assembled using a digital light processing projector (DLP), an optical microscope, alignment stages and a web camera. Layouts created on a computer screen can be easily transferred to substrate surfaces without using expensive photomasks and the process can be repeated...
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