Ba 2 TiO 4 film was prepared on Pt/Ti/SiO 2 /Si substrate by laser chemical vapor deposition. The orientation, microstructure and growth mode were investigated. The single-phase Ba 2 TiO 4 film was obtained with (103) preferred orientation at high deposition rate (R dep =45.6μmh −1 ). The (103)-oriented Ba 2 TiO 4 film on Pt (111)/Ti/SiO 2 /Si substrate showed the Ba 2 TiO 4 [103]//Pt [1–10] growth mode due to the small crystal-lattice mismatch. The surface consisted of rectangular grains, and the cross-section was columnar microstructure.