Rapid development in hard coating technology calls for simple construction depth profile analysers. Here we present results of depth profile analysis of a set of Ar arc plasma deposited TiN, CrN layers. The results are obtained with the use of recently constructed simple glow discharge mass spectrometer (GDMS) and compared with secondary ion mass spectrometer (SIMS). In SIMS (SAJW-05 model) we apply 5keV Ar + ion beam of about 100μm in diameter. Digitally controlled spiral scanning of primary ion beam is performed over 1.6mm 2 area. Secondary ions are extracted from the central part due to an “electronic gate” and analysed by quadrupole mass spectrometer QMA-410 Balzers (16mm rods).GDMS analyses are performed on SMWJ-01 glow discharge prototype spectrometer. To supply discharge in 1hPa argon we use 1.5kV DC voltage. The analysed sample works as a cathode in a discharge cell. Area of the analysis is ∼4mm 2 due to the use of secondary cathode—high purity tantalum diaphragm. Sputtered atoms are ionised, next extracted into the analytical chamber and finally analysed by the quadrupole mass analyser SRS-200 (6mm rods).The results show that the use of simple construction GDMS analyser allows obtaining similar or even slightly better depth resolution than it can be obtained in the SIMS spectrometer. Application of glow discharge analysis opens new possibilities in direct quantitative depth profile analysis of hard coatings.