The development of a non-destructive, non-contact diagnostic system to detect radiation damage is very important for measuring radioactive materials. A system using surface acoustic waves (SAWs) induced and detected by lasers was developed. The propagation velocities of SAWs on stainless steel irradiated by 20keV He and Ar ions were investigated, and a tendency for the velocity to increase with an increase in ion irradiation was observed. This tendency may be due to surface modification. A non-linear effect on ion irradiation versus normal surface velocity in the vertical direction was confirmed.