Spherical LiNi 0.8 Co 0.1 Mn 0.1 O 2 materials have been synthesized by hydroxide co-precipitation method. Layered oxyfluoride LiNi 0.8 Co 0.1 Mn 0.1 O 2−z F z (0≤z≤0.06) cathodes have been synthesized by firing NH 4 F with LiNi 0.8 Co 0.1 Mn 0.1 O 2 oxides at the relatively low temperature of 450°C. The effect of fluorine content on the structure, morphology and electrochemical performance of the LiNi 0.8 Co 0.1 Mn 0.1 O 2−z F z has been extensively studied. The results indicated that the initial discharge capacity slightly decreased with the increase in the content of fluorine substitution. However, cycling performance and rate capability were improved by the fluorine substitution. Capacity retentions after 100cycles at room temperature were 79.7% for z=0, 94.3% for z=0.02, 91.5% for z=0.04, and 86.9% for z=0.06. In addition, after being stored at 90°C for 5h in a fully charged state, fluorine substituted LiNi 0.8 Co 0.1 Mn 0.1 O 2 exhibited better cycling performance than pristine LiNi 0.8 Co 0.1 Mn 0.1 O 2 . Overall, fluorine substitution was an effective way to improve electrochemical performance.