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X-ray absorption near edge structure (XANES) spectroscopy in fluorescence detection mode is a suitable technique for the investigation of subsurface modifications induced by ion implantation on an atomic scale. This is demonstrated by our AuL III edge measurements of Au-implanted polycrystalline aluminum and Ti6Al4V. We find that gold implantation in aluminum with energies ranging between 100 and 500keV and a dose of 1x10 16 ionscm 2 leads to the formation of precipitates of the intermetallic compound AuAl 2 . Implantation into Ti6Al4V with an energy of 200keV and a dose of 1x10 16 ionscm -2 and with two different implantation energies of 200 and 400keV with a total dose of 4x10 16 ionscm -2 leads to the formation of precipitates of the intermetallic compound AuTi 3 .