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In the initial stage of low fluence ArF laser long term irradiation the absorption behavior in medium-to-high OH containing fused silica materials ([OH]=250…1400wt-ppm) depends on the OH content as well as on the initial content of oxygen deficiency centers (ODC). The absorption at a particular fluence (1mJ/cm 2 ) and its change after 193nm irradiation (20Mio. Pulses, 5mJ/cm 2 ) correlate...
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