NiFe2O4 thin film has been prepared by electron beam evaporation method and has been investigated as anode materials providing large reversible Li+ capacity with high cycling performance for lithium ion batteries. The NiFe2O4 thin film crystallized with annealing process after NiFe2O4 thin film deposition. In electrochemical measurements, the first discharge and charge capacity of NiFe2O4 thin film were found to be 1693 mAh g−1 and 1108 mAh g−1, which is above its theoretical capacity (915 mAh g−1). In addition, the cycle performance test of NiFe2O4 thin film also showed steady charge-discharge capacity at 0.1 C during 100 cycles compared to other NiFe2O4 materials, indicating that the empty space or porous surface of electrode was beneficial for accessibility of electrolyte and served as buffer to alleviate stress.