A model is presented for describing the growth kinetics of a protective oxide scale containing reactive element (RE) oxide inclusions (pegs). The formation of RE oxide inclusions due to dissolution and diffusion of the RE from intermetallic precipitates along grain or phase boundaries in the alloy is considered. The average oxide scale growth kinetics depend on the RE content, the parabolic rate constant of the protective oxide scale, the alloy grain/phase size and the size of the RE containing precipitates. The specimen thickness determines the amount of RE available for oxidation. If the RE in the alloy has been consumed completely, then the RE oxide inclusions attain a maximum size. After this point, a decrease in the average oxidation kinetics occurs. Very good agreement between experiments and calculations was obtained for the oxidation of a free-standing NiCoCrAlY coating at 1373K.