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The response of a polysilicon parallel-plate electrostatic actuator to a.c. signals at different bias voltages has been measured with a laser interferometer. Using microhinges, large plates (with areas from 100 μm 2 to 0.1 mm 2 ) with long thin support beams (such as 600 μm 3 μm 1.5 μm) are rotated off the surface of the substrate to form a parallel-plate capacitor. Fabricated...
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