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Thin films of Ti–B–N with different N contents were deposited on Si(100) at room temperature by reactive unbalanced close-field dc-magnetron sputtering using three Ti targets and one TiB 2 target in an Ar–N 2 gas mixture. The effect of N content on bonding structure, microstructure, phase configuration, surface roughness and mechanical properties have been investigated using X-ray...
We present our recent experimental results on the formation of off-axis texture and crystallographic tilting of crystallites that take place in thin film of transition metal nitrides. For this purpose, the microstructural development of TiAlN film was studied, specially the change in texture with film thickness. Fiber texture was measured using θ–2θ and pole figure X-ray diffraction (XRD), while scanning...
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