The tribological behavior of micro- and nano-crystalline diamond films is evaluated in dry sliding and water lubricating condition. The main wear mechanism is found to be abrasive wear mode induced by self-polishing. Non-diamond components and higher compressive residual stresses are detected in flat MCD films after dry sliding, in comparison to NCD. Origin of decreased friction coefficient in CVD diamond tribosystems under water lubrication is attributed to the effect of water on the formed graphic material and the chemisorbing of diamond surface with H 2 O, hydrogen or hydroxyl ions. For the MCD/NCD or NCD/MCD contact, the surface roughness of ball largely determines the stable friction coefficient in dry sliding, where NCD film usually presents higher wear rate.