Yttrium silicate environmental barrier coatings (EBCs) on C/SiC composites were fabricated by using polysiloxanes-derived ceramic process. In order to reduce the free silica in the resultant ceramic coatings, Y 2 O 3 was added as an active filler. The materials with different weight ratios of polysiloxanes to Y 2 O 3 were synthesized. Their coefficient of thermal expansion (CTE) and water-vapor resistance were tested. The results indicated that the composition of 50% Y 2 O 3 –50% polysiloxanes (Y50) was suitable to be the EBCs for C/SiC composites. The C/SiC composites coated with Y50 were tested in the water-vapor environments at 1400°C for 200h. The results revealed that such a coating could effectively protect the C/SiC composites.