Transmission elastic recoil detection analysis (ERDA), using 4 He beams with an energy of 15 MeV accelerated by a Tandem accelerator, was applied to analysis of deuterium in titanium samples with a thickness of ~72 μm. Four sandwich-type samples were prepared with a combination of 19 μm thick Ti foils, 51 μm Ti foils, and 2 μm TiD x foils. The incident direction of the helium beam was normal to the sample surfaces and the detection angle was 17.8 o . The areal density of the deuterium was found to be (a) (1.01+/-0.08)x10 1 9 atoms/cm 2 , (b) (1.11+/-0.08)x10 1 9 atoms/cm 2 , (c) (1.11+/-0.06)x10 1 9 atoms/cm 2 and (d) (0.64+/-0.05)x10 1 9 atoms/cm 2 for each sample. The full width at half maximum (FWHM) of the energy distribution of the detected deuterium was (a) (0.52+/-0.05) MeV, (b) (0.54+/-0.05) MeV, (c) (0.56+/-0.05) MeV and (d) (0.59+/-0.10) MeV. The width agreed well with that calculated from three effects: multiple scattering effect, energy straggling effect, and effect of thickness of the TiD x foil. The energy broadening was mainly due to the multiple scattering effect in the depth region of l=0-60μm while the broadening at l~70μm was due to the three effects. The depth resolution increased from 6.0 to 6.8 μm in the depth region of l<20μm, and decreased in the region of l>20μm, till it was 3.5 μm at l~70μm.