We have investigated the growth and the oxidation of the SrCuO 2 /CaCuO 2 infinite-layer superlattice films to obtain artificially layered hypothetical high-T c superconductors of SrCuO 2 + δ /CaCuO 2 , in which the excess oxygen is incorporated selectively into the Sr-Cu-O layers. The pulsed laser deposition equipped with in situ RHEED monitoring system was employed to grow thin film samples. In the case of single-layer films, the SrCuO,,, films cooled in ozone were found to have excess oxygen and exhibit weak metallic electrical transport property, while the CaCuO 2 films maintained the infinite-layer structure after cooling in ozone. On the other hand, the superlattice films cooled in ozone had either the SrCuO 2 /CaCuO 2 infinite-layer structure or the SrCuO 2 + δ /CaCuO 2 + δ structure with the excess oxygen in both the Sr-Cu-O and Ca-Cu-O layers, depending on the thickness of the Ca-Cu-O layer. The desired superlattice structure was not obtained probably because of the structural distortion accompanied by the incorporation of the excess oxygen.