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Lithium ions with dosages of 2.6×10 12 , 2.6×10 13 , 2.6×10 14 , and 2.6×10 15 cm −2 have been implanted into a GaN thin film grown on sapphire substrates. The diffusion behavior of these implanted Li ions in GaN thin film at different temperature anneals was studied using secondary ion mass spectrometry. In general, the diffusion profiles show relatively little...
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