Cerium oxide thin films were fabricated onto 316 L stainless steel via a potentiostatically anodic electrodeposition approach in the solutions containing cerium(III) nitrate (0.05M), ammonia acetate (0.1M) and ethanol (10% V/V). The electrochemical behaviors and deposition parameters (applied potential, bath temperature, dissolving O 2 and bath pH) have been investigated. Results show that, the electrochemical oxidation of Ce 3+ goes through one electrochemical step, which is under charge transfer control. The optimum applied potential for film deposition is 0.8V. Bath temperature plays a significant effect on the deposition rate, composition (different colors of the film) and surface morphology of the deposits. Due to the hydrolysis of Ce 3+ , cerous hydroxide is facility to form when the bath temperature is higher than 60°C. The electroplating bath pH is another key role for the anodic deposition of cerium oxide thin films, and the best bath pH is around 6.20. N 2 or O 2 purged into the bath will result in film porosities and O 2 favors cerium oxide particles and film generation.