Ion-beam-induced-charge collection (IBIC) in a nuclear microprobe has been used to characterise detectors for the measurement of particles over a median energy range (100 keV-1 MeV). Three standard detector devices have been studied: a PIPS detector with a buried (ion-implanted) junction structure, a Schottky barrier junction device and a PN-junction photodiode. A 2.0 MeV focussed helium ion beam was used to probe the active area of each device with a spatial resolution ~1-2 μm, to quantify the thickness of the dead layer, the charge collection response and the reduction in charge collection efficiency induced by ion-beam damage.