Toroidal profiles of the microscopic damage and erosion/deposition on the Large Helical Device (LHD) first-wall (SUS316L) were simultaneously evaluated. 10 pairs of SUS316L and Si specimens were mounted on 10 sets of special holders, and were located on the outer side of the first-wall surface in each 36° toroidal angle section (Nos. 1–10). For separate determination of the effects of glow discharge cleanings (GDCs) and main plasma discharges, two types of holders —“floating-potential” and “ground-potential”— were used in each toroidal section. The former was electrically insulated from the first wall; therefore, energetic ions could not be injected into the specimens during GDC. Hence, we could analyze two cases: with and without GDCs exposure. Sputtering erosion of the first-wall surfaces was mainly caused by GDCs and not main plasma discharges, and the erosion depths of each toroidal section were varied from 50nm to 1μm. Characteristics of the deposition layers and microscopic damages on the SUS316L matrix were different in each toroidal section.