Well ordered monolayer arrays of hollow SnO 2 shell were fabricated by combining colloidal templating and pulsed laser deposition methods. With increasing the thickness of SnO 2 hollow films, their half-spherical morphologies gradually develop to a bell-shaped one. While the surface of SnO 2 thin films is fairly flat, the surface of hollow SnO 2 shells consists of protruding crystals, indicating morphological dependency on the presence of substrate. Because of the low population of contiguous hollow SnO 2 shells, arrays of hollow SnO 2 showed higher dc electrical resistance than those of thin films.