Epitaxial YBa 2 Cu 3 O 7 (YBCO) films with high-critical-current density (J c ) properties were successfully prepared on cerium oxide-buffered sapphire (r-cut α-Al 2 O 3 ) substrates by an excimer-laser-assisted metalorganic deposition (ELAMOD) using a new irradiation manner. The previously reported ELAMOD process in which the laser beam is irradiated from the surface of the substrate has brought about the advantages of shorter heating time as well as high-J c of the YBCO films [M. Sohma, T. Tsuchiya, K. Tsukada, I. Yamaguchi, T. Manabe, T. Kumagai, K. Koyanagi, T. Ebisawa, H. Ohtsu, IEEE Trans. Appl. Supercond. 15 (2007) 3612; M. Sohma, T. Tsuchiya, K. Tsukada, I. Yamaguchi, T. Manabe, T. Kumagai, K. Koyanagi, T. Ebisawa, H. Ohtsu, Physica C 463–465 (2007) 891]. The J c values over 6MA/cm 2 has been reported by an inductive method at 77.3K only for the laser-irradiated areas. An awaiting solution has remained since the appropriate fluence range of the laser beam is much limited to obtain high-J c ELAMOD–YBCO films with good reproducibility. In this paper we report a new irradiation manner to resolve the difficulty. The backside of the substrate was irradiated by homogenized KrF excimer laser beam (scanning mode) after application of a fluorine-free ingredient solution. The indispensable laser fluence increased to obtain the high-J c YBCO films because of absorption from the substrate and the CeO 2 buffer. High-J c values of around 6MA/cm 2 at 77.3K using an inductive method were obtained in the area irradiated at a wider fluence range, while a part of unirradiated area also showed relatively high-J c of 2–5MA/cm 2 . Attenuation and scattering effects are considered to bring the extended option of the laser fluence.