Poly(silphenylenesiloxane)s containing hydride or vinyl functional side groups were successfully synthesized by deaminative polycondensation of bis(aminosilane)s having the functional groups with monomeric or polymeric bis(silanol). The bis(silanol) prepolymer was prepared by palladium-catalyzed dehydrocoupling polymerization of 1,4-bis(dimethylsilyl)benzene with water. 1 H, 1 3 C, and 2 9 Si NMR revealed that the polymers have exactly alternating structure of the starting component units. The poly(silphenylenesiloxane)s containing functional side groups have low T g s ranging from -23 to -40 o C, and exhibit good thermal stability in both nitrogen and air atmosphere. For example, the most thermally stable polymer 3b-alt, having vinyl side groups on half silicon atoms, has T g at -33 o C which is 11 o C lower than that of the all-methyl substituted PTMPS, and shows the highest degradation temperature at 498 o C in nitrogen and 521 o C in air. The TGA residues at 800 o C are 67% in nitrogen and 54% in air. Isothermal studies revealed 3b-alt only lost 2.5% weight after 5h at 400 o C in nitrogen.