Ultra-low Pt content PEMFC electrodes have been manufactured using magnetron co-sputtering of carbon and platinum on a commercial E-Tek ® uncatalyzed gas diffusion layer in plasma fuel cell deposition devices. Pt loadings of 0.16 and 0.01mgcm −2 have been realized. The Pt catalyst is dispersed as small clusters with size less than 2nm over a depth of 500nm. PEMFC test with symmetric electrodes loaded with 10μgcm −2 led to maximum reproducible power densities as high as 0.4 and 0.17Wcm −2 with Nafion ® 212 and Nafion ® 115 membranes, respectively.