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Finding ways to scribe indium-tin oxide (ITO) coating plays an important role in the fabrication and assembly of thin film solar cells. Using a femtosecond (fs) laser, we selectively removed the ITO thin films with thickness 120–160nm on glass substrates. In particular, we studied the effect of laser pulse duration, laser fluence and laser scanning speed on the ablation of ITO. The single pulse ablation...
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