Polydimethylsiloxane (PDMS), polyhydromethylsiloxane (PHMS), and polymethylphenylsiloxane (PMPhS) have been studied by TOF-SIMS to investigate effects of functional group changes on polymer fragmentation mechanisms. Cyclic fragments are observed in the low mass range spectra of PDMS and PHMS, but not in the spectrum of PMPhS. Effects of functional group substitution on the fragmentation mechanisms of polysiloxanes are evident in the high mass range spectra (>1000 Da). Peaks of oligomers cationized by silver dominate the high mass range of the spectra of all low molecular weight polysiloxanes. However, fragmentation patterns of these samples are different. Neutral cyclic fragments cationized by silver are identified in the high mass range of the spectra of PDMS and PHMS, but not in the spectrum of PMPhS. The major fragments of PHMS and PMPhS are [oligomer-14+Ag] + . The PHMS spectrum also shows peaks [oligomer-28+Ag] + . These distinctive fragmentation patterns can be used to identify the polysiloxanes.