The round robin study of reference standards of 3 5 Cl, 3 2 S and 1 2 C implanted into Cu films using five SIMS instruments from Taiwan SIMS users was attempted. Significant differences in RSFs but similarity in maximum peak concentration among different instruments was observed. For 3 5 Cl, 3 2 S and 1 2 C measured using Cameca ims-6f, the RSF is 3.67E+19, 5.44E+20, 4.24E+21, the detection limit is 2.5E+16, 3.17E+16, 2.34E+18, and the dynamic range is 8.11E+3, 2.22E+4, 2.3E+1, respectively. The exchangeable use of RSF is recommended among model-specific instruments.