Thin films of Cu m - 1 Ba m (Sr,Ca) n Cu n + 1 O 2 m + 2 n + 1 , i.e., [BaCuO 2 ] m /[(Sr,Ca)CuO 2 ] n superlattices have been grown by layer-by-layer growth method with rf magnetron sputtering on NdGaO 3 (110) substrate. Two targets with the compositions BaCuO 2 and (Sr,Ca)CuO 2 , which form the charge reservoir and superconducting layers, respectively, were used. [BaCuO 2 ] m /[(Sr,Ca)CuO 2 ] n superlattice was grown at 460-520 o C in a gas mixture of Ar and N 2 O by alternatively depositing the charge reservoir layer and superconducting layer. The superlattice modulation is close to that of high pressure synthesized bulk materials. By means of the layer-by-layer growth method, a system of Cu-based artificial lattice structures is formed. Electrical transport properties of these superlattices were also investigated.