Hazardous industrial chemical gases pose a significant threat to the environment and human life. Therefore, there is an urgent need to develop a reliable sensor for identifying these hazardous gases. In this work, a silicon wafer microelectrode substrate for a resistance sensor was fabricated using the semiconductor manufacturing process. Conductive carbon nanotubes were then mixed with six different polymers with different chemical adsorption properties to produce a composite thin film for the fabrication of a chemical sensor array. This array was then utilized to identify three hazardous gases at different temperatures. Experimental results for six polymers for chemical gases, such as tetrahydrofuran (THF), chloroform (CHCl 3 ) and methanol (MeOH) at different temperatures, indicate that the variation in sensitivity resistance increased when the sensing temperature increased. The poly(ethylene adipate)/MWNT sensing film had high sensitivity, excellent selectivity, and good reproducibility in detecting all chemical agent vapors. Additionally, this study utilized a bar chart and statistical methods in principal component analysis to identify gases with the polymer/MWNT sensor.