Single phase, c-axis oriented infinite layer (IL) Sr 1− x Nd x CuO 2 thin films were epitaxially grown on (110) DyScO 3 substrates by molecular beam epitaxy (MBE). Electron impact emission spectroscopy (EIES) is the tool of choice for a stringent stoichiometry control which is essential for Sr 1− x Nd x CuO 2 thin film preparation. As-grown films contain excess oxygen and therefore a reduction process is necessary to induce superconductivity. In the present study special attention was paid to the underdoped region since the optimization of the reduction process becomes more difficult for lower doping levels x. Sr 0.95 Nd 0.05 CuO 2 films (underdoped) became superconducting with Tconset=30K and Tczero=11.4K after an annealing procedure.