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Poor thermal stability of porous Ag-based films is one of annoying issues for practical applications. In this letter, the microstructures and thermal stability of Al-doped porous Ag-based films were investigated. Al-doped porous Ag-based films have similar porous structure and high absorption to undoped one. But the pore dimension decreases with increasing Al concentration. Compared with undoped porous...
In this work, TiVCrZrHf high entropy alloy ultrathin films were deposited on Si/SiO2 substrate as diffusion barrier layers of Cu thin films by magnetron sputtering. The microstructure and texture of TiVCrZrHf/Cu thin films during annealing were investigated. The experimental results show that the TiVCrZrHf films could retard interdiffusion in Cu thin films upon annealing up to 600 °C, and retain stable...
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