YBa 2 Cu 3 O 7 - x (YBCO) films were prepared by deposition from aerosol generated by pneumatic and ultrasonic atomizers. As substrates we used singlecrystalline yttrum-stabilized zirconia (YSZ) and MgO. Various substrate temperatures were applied during deposition, and the deposited precursor films were annealed under two basically different conditions, i.e., annealing in oxygen at atmospheric pressure at temperatures being around T 900°C, or in a vacuum degraded by partial pressure of oxygen at temperatures T≤600°C. Influence of these processing conditions upon the T c and J c values as well as the surface morphology is reported.