We report on the epitaxial growth of 1:2:0:1 type CuBa 2 CuO y layer, an infinite layer CaCuO 2 and their superlattice (1x3) by self-assembling epitaxy method, involving rf magnetron sputtering, on (100) SrTiO 3 substrate. Excellent (001) films of both the CuBa 2 CuO y and CaCuO 2 with c~8.4 and 3.2 Å, respectively, were obtained. A superlattice with a period of about 18.5 Å which corresponds to the formula CuBa 2 Ca 3 Cu 4 O y was prepared by growing alternatively the 1:2:0:1 and CaCuO 2 at about 500 o C in a gas mixture 10-20 mTorr of Ar+N 2 O. The as-grown superlattice film showed a superconducting diamagnetic signal at about 20 K.