In this paper, we describe the design, fabrication, and testing of monolithically micromachined silicon probes for scanning probe microscope (SPM) applications. An SPM probe consists of three parts: an atomically sharp tip, a supporting flexural beam, and a handle. Unique design and fabrication processes allow probes with uniform geometry to be developed efficiently. The process is robust, as no time-critical steps are involved. Tips are formed by anisotropic etching followed by oxidation sharpening. Monolithic process enhances reliability of the probe by eliminating post-fabrication assembly steps such as wafer bonding. We have demonstrated SPM probes with excellent mechanical characteristics, including high resonant frequency and zero intrinsic bending.