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We have deposited ferroelectric (FE) Pb 0.92 La 0.08 Zr 0.52 Ti 0.48 O 3 (PLZT) films on nickel substrates by chemical solution deposition. Energy density of ≈46 J/cm 3 has been measured with 1.15-µm-thick PLZT/LNO/Ni film-on-foil capacitors. A series of highly accelerated lifetime tests were performed to determine the reliability of these FE film-on-foil capacitors under high temperature and high field stress. Samples were exposed to temperatures ranging from 100 to 150 °C and electric fields ranging from 8.7×10 5 V/cm to 1.3×10 6 V/cm. The breakdown behavior of the FE PLZT film-on-foil capacitors was evaluated by Weibull analysis. The activation energy was determined to be ≈0.35 eV when an electric field of 1.05×10 6 V/cm was applied. The voltage acceleration factor was ≈−6.3 at 100 °C. The mean time to failure was projected to be >3000 h at 100 °C with a dc electric field of ≈2.6×10 5 V/cm.