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In this paper, results of spectroscopic study of microwave (2.45 GHz) plasma at atmospheric pressure and high CO_2 flow rate are presented. The plasma was generated by waveguide-supplied nozzleless cylindrical type microwave plasma source. Working gas flow rate and microwave absorbed power varied from 50 up to 150 l/min and from 1 up to 5.5 kW, respectively. The emission spectra in the range of 300-600...
The aim of this paper is to present a novel microwave microplasma source generated in different gases at atmospheric pressure. The design, rule of operation and experimental investigations of the new microwave microplasma source are described. The main advantage of the presented microwave microplasma source is its small size, simplicity, and low cost of construction and operation. The microplasma...
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