Acta Physica Polonica A > 2014 > 125 > 1 > 46-48
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journal ISSN : | 0587-4246 |
journal e-ISSN : | 1898-794X |
DOI | 10.12693/APhysPolA.125.46 |
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Bibliography
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[1] M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharge and Materials Processing, Wiley, Hoboken 2005
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[2] C. Lee, M.A. Lieberman, doi: 10.1116/1.588371, J. Vac. Sci. Technol. A 13, 308 (1995)
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[3] J.T. Gudmundsson, M.A. Lieberman, doi: 10.1088/0963-0252/7/1/002, Plasma Sources Sci. Technol. 7, 1 (1998)