Zeszyty Naukowe. Cieplne Maszyny Przepływowe - Turbomachinery / Politechnika Łódzka > 2007 > nr 131 > 69-78
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journal ISSN : | 0137-2661 |
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Bibliography
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[1] Ayon A. A., Zhang X., Khanna R., Ultra Deep Anisotropic Silicon Trenches Using Deep Reactive Ion Etching (DRIE), Proc. of Solid-State Sensor and Actuator Workshop, Hilton Head Island, South California (2000), U.S.A., 339-342.
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[2] Daejong K., Design of Flexure Pivot Tilting Pads Gas Bearings for High-speed Oil-Free Microturbomachinery, Journal of Tribology, ASME, Vol. 129 (2007) 112-119.
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[3] Dessornes O., Guidez J., Rribaud, Y., Courvoisier T., Dumand C., Orain M., Kozanecki Z., Helin P., Le Moal P., Minotti P., Three Technological Bricks for a Micro Turbine Concept for Micro Power Generation, Proc. of The Fifth Intern. Workshop on Micro Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS, Tokyo (2005), Japan.